Nanofabrication :Techniques and Principles
Nanofabrication :Techniques and Principles
paperback
Published:
28 January, 2014
paperback
Published:
28 January, 2014
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Description
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
More Details
| Type | Book |
|---|---|
| ISBN13 | 9783709116661 |
| ISBN10 | 370911666X |
| Number Of Pages | 344 |
| Item Weight | 1000 g |
| Publisher / Reseller | Springer Verlag GmbH |
| Format | paperback |
| Edition | 2012 ed. |
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