Scanning Electron Microscopy :Physics of Image Formation and Microanalysis - Springer Series in Optical Sciences

Scanning Electron Microscopy

Scanning Electron Microscopy :Physics of Image Formation and Microanalysis - Springer Series in Optical Sciences

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Description

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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More Details

Type Book
ISBN13 9783642083723
ISBN10 3642083722
Number Of Pages 529
Item Weight 1000 g
Publisher / Reseller Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Format paperback
Edition Second Edition 1998
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Media Reviews

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

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