Mechanical Microsensors (Microtechnology and MEMS)

Mechanical Microsensors (Microtechnology and MEMS)

by M . Elwenspoek (Author), R.Wiegerink (Author)


This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit- zerland, and developed and taught by the authors.



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Format: Hardcover
Pages: 295
Edition: illustrated edition
Publisher: Springer
Published: 27 Nov 2000

ISBN 10: 3540675825
ISBN 13: 9783540675822